发明名称 Reactor vessel having improved cup, anode and conductor assembly
摘要 An improved anode, cup and conductor assembly for a reactor vessel includes an anode assembly supported within a cup which holds a supply of process fluid. The anode assembly has an anode shield carrying an anode. The anode shield and the anode are supported from below by a delivery tube which also serves to deliver process fluid to the cup. A bayonet connection is provided between a top portion of the delivery tube and the anode assembly. The fluid delivery tube has a fixed height within the vessel. The anode elevation is adjusted by the interposing of a spacer of desired thickness between the anode and the tube. An electrical conductor is connected to the anode, and passes through the tube to be electrically accessible outside the vessel. The conductor is connected to the anode with a plug-in connection which is completed when the tube is coupled to the anode by the bayonet connection. A spring loaded bellos seal and a corrugated sleeve seal the electrical conductor from the anode, though the delivery tube, and to the outside electrical accessibility.
申请公布号 US6280582(B1) 申请公布日期 2001.08.28
申请号 US19990385781 申请日期 1999.08.30
申请人 SEMITOOL, INC. 发明人 WOODRUFF DANIEL J.;HANSON KYLE M.
分类号 C25D17/00;C25D5/08;C25D7/12;C25D17/06;(IPC1-7):C25D17/02;C25D17/10 主分类号 C25D17/00
代理机构 代理人
主权项
地址