| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal history estimating method, capable of performing measurements in a short time, in which it is not necessary to collect the part of a material which constitutes equipment from the operating equipment, as a substance to be measured or to create a master curve for each equipment. SOLUTION: A tape, which receives heat and changes its reflection absorbance according to chemical kinetics, is used. The tape is taken out from the equipment, after the equipment is operated for a prescribed time, to compute the reflection absorbance difference between two wavelengths. The thermal history (average operating temperature) of the equipment during operation is computed through the use of a master curve in the thermal history estimating method.
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