| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for preparing a processing liquid for electronic parts capable of obtaining the processing liquid for the electronic parts of high purity which is extremely low in the concentration of metallic components, i.e., impurities, and is therefore most adequately usable for a manufacturing process for semiconductors, etc., and a method for preparing the processing liquid for the electronic parts. SOLUTION: This apparatus for preparing the processing liquid for the electronic parts including a stage for feeding and mixing >=2 chemicals within a mixing tank includes an ion exchange resin or ion exchange resin packed with chelate resin or chelate resins treating column in a feeding process for at least one chemical. |
