| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for measuring radiation temperature, by which the temperature of a susceptor, etc., can be measured wit higher accuracy, as compared with the conventional method. SOLUTION: A hole 20 is bored into an AlN susceptor 6, on which a wafer 2 is placed and the front end of the fiber rod 21 of an optical fiber, is inserted into the hole 20. In addition, the other end of the rod 21 is connected to a radiation thermometer 8. Then the temperature of the susceptor 6 is measured, by using a wavelength shorter than 10.9μm which is the wavelength corresponding to the energy of the horizontal optical phonons characteristic of the AlN as a measuring wavelength.
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