| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator, having an electrode structure capable of bonding over a large area. SOLUTION: On a crystal wafer 130 formed with plural vibrators 20 composed of crystal vibrator pieces 110 and frame-shaped parts 100, plural electrode patterns 160, which are composed of a pair of exciting electrode films 80 and 81 formed on the respective crystal vibrator pieces 110 and bonding films 40 and 41, formed on the respective frame-shaped parts 100 and connected with a pair of exciting electrode films 80 and 81, are formed and the electrode patterns 160 are mutually connected by a short sputter film 70 of a metal film.</p> |
