| 发明名称 |
STRIPPING AGENT AGAINST RESIST RESIDUES |
| 摘要 |
The invention provides a nontoxic, undangerous resist residue remover that enables removal of resist residues to be carried out without metal corrosion or other problems and with safety. The remover is an aqueous solution containing ammonium phosphate and/or condensed ammonium phosphate and having a pH ranging from 1 to 10. <IMAGE> |
| 申请公布号 |
EP1063689(A4) |
申请公布日期 |
2001.08.22 |
| 申请号 |
EP19990961289 |
申请日期 |
1999.12.09 |
| 申请人 |
KISHIMOTO SANGYO CO., LTD. |
发明人 |
YATA, TAKASHI;TERAYAMA, SHIGEKI;KOINUMA, YUTAKA;OHGUSHI, TAKERU |
| 分类号 |
H01L21/302;G03F7/42;H01L21/027;H01L21/304;H01L21/3065;H01L21/308;H01L21/311 |
主分类号 |
H01L21/302 |
| 代理机构 |
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| 主权项 |
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