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发明名称
SiO2 COATED MIRROR SUBSTRATE FOR EUV
摘要
申请公布号
KR20010079499(A)
申请公布日期
2001.08.22
申请号
KR1020017000156
申请日期
2001.01.05
申请人
发明人
分类号
G21K1/06
主分类号
G21K1/06
代理机构
代理人
主权项
地址
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