| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator manufactured by using a forming method of a through-hole having an excellent through shape. SOLUTION: Protective films 24 are formed on an upper surface and a lower surface of a lid body forming substrate 22, openings are provided in a recessed part 13 forming part and a through-hole 22a forming part, a resist film 25 for blast is formed at a through-hole 22a forming side and an opening is provided in the through-hole 22a forming part, a blast processing is executed and a preliminary hole 32 is opened. Thereafter, the resist film 25 for blast is removed, chemical etching is executed to form the recessed part 13 and the through-hole 22a.</p> |
