发明名称 |
Purification of nitrogen trifluoride by continuous cryogenic distillation |
摘要 |
The process recovers NF3 from a multicomponent fluid containing NF3, one or more components less volatile than NF3, and one or more components more volatile than NF3. The process uses a first distillation column and a second distillation column, each distillation column having a top and a bottom. The process includes the following steps: feeding the multicomponent fluid to the first distillation column at a first feed location below the top of the first distillation column; feeding a cryogenic liquid to the first or second distillation column adjacent the top of the first or second distillation column; withdrawing a mixture containing NF3 from the first distillation column; feeding the mixture to the second distillation column at a second feed location; separating NF3 from the mixture in the second distillation column; and removing a stream of NF3 from the second distillation column.
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申请公布号 |
US6276168(B1) |
申请公布日期 |
2001.08.21 |
申请号 |
US20000566075 |
申请日期 |
2000.05.08 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
FIDKOWSKI ZBIGNIEW TADEUSZ;CIRUCCI JOHN FREDERICK;AGRAWAL RAKESH;SUCHDEO SHYAM RAMCHAND;AUVIL STEVEN RAY |
分类号 |
F25J3/08;B01D3/14;C01B21/083;F25J3/02;(IPC1-7):F25J1/00 |
主分类号 |
F25J3/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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