| 摘要 |
PROBLEM TO BE SOLVED: To prevent the clogging of a ball valve through which the treating agent of a dissolution tank passes. SOLUTION: A filter unit 48 is provided with filter elements 54. The treating liquid formed by dissolving a treating agent in the dissolution tank is passed through the filter elements and is discharged. The filter elements are formed by plane mat weaving using stainless steel in such a manner that >=#50 to <=#110 mesh may be attained. As a result, the particles of the treating agent permeated through the filter elements are prevented from depositing on the ball valve and giving rise to an operation defect, such as clogging, while the occurrence of the clogging in the filter elements themselves is suppressed.
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