| 摘要 |
PURPOSE: A power delivery system is provided to measure characteristics of radio frequency energy delivered in an industrial radio frequency processing system. CONSTITUTION: A plurality of generating unit(300,310,315) feeds the combining unit(320). A detecting unit(330) measures data associated with the RF energy supplied to the plasma chamber(350) at a first frequency. This data may comprise the supplied voltage, current, and phase. This data is stored, and the detecting unit(330) is switched to a second frequency. This is repeated until all the frequencies are cycled through, at which point the detecting unit(330) is switched back to the first frequency.
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