| 摘要 |
PROBLEM TO BE SOLVED: To provide a suctionless hand which can hold a substrate without sucking. SOLUTION: A nonslip sheet 10 provided with a nonslip part 10a on its upper part is attached to the substrate holding part 3 of a hand 1. The nonslip part 10a is provided with an uneven surface, which holds a substrate W with a large frictional resistance. In the case the substrate W having a warpage is held, one end of the nonslip part 10a is brought into contact with the lower surface of the substrate, so that a fraction angle is formed on the nonslip part 10a. As a result, the friction resistance is made large, resulting in preventing the displacement of the substrate and holding it stably. |
