Piezoelectric substrate used in the production of SAW components comprises wafer made of piezoelectric crystal material with absorber layer having high optical absorption applied on rear side of wafer

摘要

A piezoelectric substrate comprises a wafer (1) made of piezoelectric crystal material with an absorber layer (2) having a high optical absorption applied on the rear side of the wafer. An independent claim is also included for the production of a component having a piezoelectric substrate comprising applying an absorber layer to the rear side of a wafer; forming component structures having a metallization on the front side of the wafer; and using phototechnology to produce the component structures. Preferred Features: The rear side of the wafer is mechanically roughened below the absorber layer. The absorber layer is a high ohmic layer with an electrically insulating lacquer as matrix, in which electrically conducting particles, preferably carbon black or graphite, are embedded.