发明名称 |
Cooling of voice coil motors in lithographic projection apparatus |
摘要 |
A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil., for use in a lithographic projection apparatus comprising: a radiation system for supplying a projection beam of radiation; a first object table for holding a mask; a second object table for holding a substrate; a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and preferably is of a monolithic construction.
|
申请公布号 |
US2001013580(A1) |
申请公布日期 |
2001.08.16 |
申请号 |
US20010777701 |
申请日期 |
2001.02.07 |
申请人 |
BUIS EDWIN J.;GILISSEN NOUD J.;KWAN YIM BUN P.;SCHAPENDONK PAULUS H.C.M. |
发明人 |
BUIS EDWIN J.;GILISSEN NOUD J.;KWAN YIM BUN P.;SCHAPENDONK PAULUS H.C.M. |
分类号 |
H01L21/027;G03F7/20;H02K3/24;H02K9/19;H02K9/22;H02K33/18;H02K41/02;H02K41/035;(IPC1-7):G21K5/10;H01J37/08 |
主分类号 |
H01L21/027 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|