发明名称 PROCESSING LINE HAVING MEANS TO MONITOR CRYSTALLOGRAPHIC ORIENTATION
摘要 Apparatus for continuously moving a substrate and coating the substrate with a crystalline coating has at least one means for monitoring the crystalline orientation of the coating, either continuously or periodically.
申请公布号 WO0159186(A1) 申请公布日期 2001.08.16
申请号 WO2001US03948 申请日期 2001.02.07
申请人 MICROCOATING TECHNOLOGIES, INC.;SHOUP, SHARA, S.;HUNT, ANDREW, TYE 发明人 SHOUP, SHARA, S.;HUNT, ANDREW, TYE
分类号 C23C16/52;C23C16/54;C30B23/02;C30B25/02;C30B25/16;H01L39/24 主分类号 C23C16/52
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