| 摘要 |
PROBLEM TO BE SOLVED: To prevent the increase of the temperature of a substrate in emergency. SOLUTION: In emergency, in the case a substrate is included in the heating region of a treating chamber 14A, this substrate is carried to an adjacent corner chamber 22A or 22B. Alternatively, in the case a substrate is included in the heating region of a treating chamber 14B, this substrate is carried to an adjacent corner chamber 22B or a treating chamber 14C.
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