| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable a pellet pickup apparatus to be improved in throughput and reduced in size without resetting a suction nozzle nor requiring a suction nozzle rotating mechanism by making the moving range of a wafer stage smaller. SOLUTION: A pellet pickup apparatus is equipped with a wafer stage 20 on which a wafer is placed, a pushing unit 10 which picks up pellets obtained by dicing a wafer, a pushing unit moving means 12 which moves the pushing unit 10 to a prescribed position, a wafer stage moving means 32 which successively moves the pellets on the wafer stage 20 to the pickup target position of the pushing unit 10, and a pushing unit driving unit which drives the pushing unit 10 to pick up the pellets which are successively moved to the pickup target position.</p> |
