| 摘要 |
PROBLEM TO BE SOLVED: To restrain accumulation of components of ion-source gas at least in an insulated evacuation pipe existing on the way of an evacuation line. SOLUTION: There is an evacuation line 20 which carries evacuation gas from a vacuum pumping device 18 vacuum evacuating an ion source 4 to the outside of a shield cabinet 30, and the insulated evacuation pipe 22 is arranged on the way of the evacuation line 20 and between a high-voltage box 24 and the shield cabinet 30. A decontamination device 34 to remove harmful materials contained in the evacuated gas from the vacuum pumping device 18 is arranged in the evacuation line 20 within the high-voltage box 24.
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