摘要 |
PROBLEM TO BE SOLVED: To solve a problem that the temperature of the vibration of an ultrasonic actuator cannot be accurately measured with a temperature sensor and the driving capability of the ultrasonic actuator is degraded as driving progresses. SOLUTION: The ultrasonic actuator 10 is provided with an vibrator 11, a fixing member 12, a first drive signal transmitting member 13, a relaying member 14, a second drive signal transmitting member 15, and a drive unit 16 that is connected with the second drive signal transmitting member 15 and produces drive signals for the vibrator 11. The relaying member 14 is secured on a vertical wall face 12b of the outer faces of the fixing member 12 which vertical wall face is positioned in proximity to the vibrator 11 and the temperature sensor 35 for detecting the temperature of the vibrator 11 is installed on the relaying member 14. |