| 摘要 |
<p>Provided are apparatus and methods for mixing gases. The apparatus (100) is suitable for use in the manufacture of electronic devices. The apparatus (100) includes a mixing manifold (130). A first bulk gas source (110) and second bulk gas source (120) are connected to the mixing manifold (130) to introduce first and second gases to be mixed. A conduit (132) connects the mixing manifold (130) containing the gas mixture to a point of use (140).</p> |
