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经营范围
发明名称
MICROMECHANICAL SENSOR
摘要
申请公布号
EP0939888(B1)
申请公布日期
2001.08.08
申请号
EP19970951802
申请日期
1997.11.21
申请人
INFINEON TECHNOLOGIES AG
发明人
SCHEITER, THOMAS;NAEHER, ULRICH;HIEROLD, CHRISTOFER
分类号
G01L9/12;G01L9/00;H01L29/84;H04R19/00;(IPC1-7):G01L9/00;G01L1/14;G01H11/06
主分类号
G01L9/12
代理机构
代理人
主权项
地址
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