Method of controlling electrostatic lens using beam characteristics,申请号GB20000027469-传众专利搜索

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发明名称	Method of controlling electrostatic lens using beam characteristics
摘要
申请公布号	GB2358956(A)	申请公布日期	2001.08.08
申请号	GB20000027469	申请日期	2000.11.10
申请人	* NISSIN ELECTRIC CO LTD	发明人	KOJI * IWASAWA
分类号	H01J37/21;C23C14/48;G01Q30/02;G01Q60/44;G21K1/08;H01J37/304;H01J37/317;H01L21/265;(IPC1-7):H01J37/304	主分类号	H01J37/21
代理机构		代理人
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