发明名称 Method for producing narrow wires comprising titanium oxide, and narrow wires and structures produced by the same method
摘要 A method for producing narrow wires including titanium oxide of high crystallinity and diameter of the order of nanometer, in particular whiskers of titanium oxide, and including a first step of preparing a base having a titanium-including surface, second step of discretely depositing a material other than titanium over the above surface, and third step of thermally treating the above surface, obtained by the second step, in a titanium-oxidizing atmosphere.
申请公布号 US6270571(B1) 申请公布日期 2001.08.07
申请号 US19990436989 申请日期 1999.11.09
申请人 CANON KABUSHIKI KAISHA 发明人 IWASAKI TATSUYA;DEN TOHRU
分类号 H01L31/04;B81C1/00;C30B11/12;C30B25/00;C30B29/62;(IPC1-7):C30B23/00 主分类号 H01L31/04
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