| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine particle measuring device for measuring the density (number) or the like of fine particles for each particle diameter at high sensitivity, a fine particle collecting device for collecting the monodisperse fine particles classified according to particle diameter onto a substrate or the like with efficiency in a uniform distribution of fine particle densities, and a fine particle analyzing device for analyzing with high accuracy the composition, structure, physical properties and the like of the fine particles collected on the substrate or the like. SOLUTION: In DMA 2, fine particles contained in an aerosol are classified according to particle diameter based on their electric mobility. After classification the aerosol is introduced into an aerodynamic lens 3 through a valve 13 and the fine particles contained in the aerosol are concentrated into a fine-particle beam B, which is then introduced into a vacuum chamber 5 through a nozzle 4. Thus, only the fine particles focused by the nozzle 4 propagate downward in the form of the fine-particle beam B. The fine particles (fine-particle beam B) separated by the aerodynamic lens 3 and the nozzle 4 are introduced into a high vacuum chamber 12 through the vacuum chamber 5 or the like to perform measurement, collection, analysis and the like of the fine particles inside the high vacuum chamber 12.
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