METHOD AND APPARATUS FOR DETECTING DISPLACEMENT QUANTITY IN DRIVE APPARATUS, HIGH QUALITY PROCESSING METHOD IN PLATE MATERIAL PROCESSING MACHINE AND HIGH QUALITY PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To efficiently manufacture and process a product of high quality by monitoring a laser processing state on the basis of the displacement of a slide system in a real time to automatically determine the optimum processing condition. SOLUTION: When the carriage 19 attached to the nut member 23 threaded with an X-axis ball screw 25 is moved by rotationally driving the X-axis ball screw 25 by a rotary drive means, the light of the light source body 35 provided on the carriage 19 is projected toward a large number of slits 33 provided in a main scale 31 at an equal interval in the moving direction of the carriage 19 from one side of the main scale 31 provided in parallel to the X-axis ball screw 25. Since the light source body 35 and a phase detection part 37 are vibrated in synchronous relation to the vibration of the carriage 19, the light of the light source body 35 passes through the slits and phase difference is detected by the phase detection part 27 and the moving direction and displacement quantity of the carriage 19 are certainly detected.