| 摘要 |
PROBLEM TO BE SOLVED: To provide a control method that estimates a control volume using values obtained continuously at a high speed, interpolates the value between discrete values, assures to track a high frequency target value, and suppresses influence caused by high frequency external noises over equipment. SOLUTION: The method provides a controller 2a that makes the target value track a control target object 1 and a detector 4a that detects the discrete values of the control target object 1. The controller 2a detects differentiated and the second derivative of control values for the control target object 1, interpolates the discrete value by estimating values detected by the detector 4a, and controls the control target object 1 with a help of the interpolated value and the desired value.
|
