发明名称 WET PROCESSING METHOD FOR THE ELECTRONIC COMPONENTS USING LIQUIDS OF VARYING DENSITY
摘要 <p>The present invention is directed to wet processing methods for the manufacture of electronic component precursors, such as semiconductor wafers used in integrated circuits. More specifically, this invention relates to methods of manufacturing electronic component precursors using liquids of varying density.</p>
申请公布号 WO2001054835(A1) 申请公布日期 2001.08.02
申请号 US2001003040 申请日期 2001.01.31
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