Damper system and bearing centering device for magnetic bearing vacuum pump

摘要

In a vacuum pump according to the invention, the rotor is held inside the stator by radial magnetic bearings, and its radial movements are limited by one or more landing mechanical bearings each made up of a rotor rolling bearing race and a stator rolling bearing race. At least one coaxial ring of elastomer in the shape of a torus is inserted between the outside peripheral surface of the stator rolling bearing race and the stator itself to constitute a damped elastic connection which significantly increases the reliability and the service life of the landing mechanical bearing.