发明名称 METHOD AND APPARATUS FOR DRYING COATING SOLUTION USING MICRO WAVE
摘要 PURPOSE: A method and apparatus for drying a coating solution using a micro wave is provided to easily control drying temperature and drying speed, minimize energy loss, and employ a new energy source without discharging carbon dioxide. CONSTITUTION: A housing(3) is shaped like a box. A housing inlet part and a housing outlet part are installed on both sides of the housing(3) and have the same space. However, the housing inlet and the housing outlet have a two-stage shape in an outer appearance together with the housing(3). A magnetron is slightly biased from a center of length direction toward an inlet side of a drying apparatus. The other magnetron includes a magnetron(1), a discharge tube, a power supplying part, a control part and a multi-layered microwave shielding film. The two sets of magnetron(1) are slightly biased toward an outlet side. The discharge tube is attached on a central part of an upper end surface(10) of the housing and has a discharge fan formed on a lower part thereof. The power supplying part(14) is installed on the upper end surface(10) of the housing. The control part(15) is installed on a housing inlet part(17). A multi-layered micro wave shielding film is attached within the housing inlet part and the outlet part.
申请公布号 KR20010073474(A) 申请公布日期 2001.08.01
申请号 KR20000001881 申请日期 2000.01.15
申请人 KWON, JOUNG SU 发明人 KWON, JOUNG SU
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址