MEMS optical cross-connect switch

摘要

A microelectromechanical structure capable of switching optical signals from an input fiber to one of two or more output fibers. In one embodiment, the MEMS optical cross-connect switch comprises a first microelectronic substrate (12) having a pop-up mirror (14) disposed on the surface of the substrate and a rotational magnetic field source (40), such as a variably controlled magnetic field source. The rotational magnetic field source allows for reliable actuation of the pop-up mirror from a non-reflective state to a reflective state. Additionally the invention is embodied in a MEMS optical cross-connect switch having a first microelectronic substrate having a pop-up mirror disposed on the surface of the substrate and a positioning structure (22) disposed in a fixed positional relationship relative to the first substrate. The invention is also embodied in an optical cross-connect switch array of multiple pop-up mirrors and positioning structures. Additionally, the invention is embodied in an optical cross-connect switch system having one or more optical fiber inputs and two or more optical fiber outputs. Methods for conducting optical cross-connect switching and fabrication methods are also provided. <IMAGE>