发明名称 |
Apparatus for cleaning items using gas plasma |
摘要 |
A plasma cleaning apparatus for cleaning lead frames or other items comprised of a chamber adapted for containing a plasma, a magazine positioned in the chamber for holding the lead frames, a first active electrode positioned in the chamber on one side of the magazine and a second active electrode positioned in the chamber on the other side of the magazine. A first grounded electrode is positioned between the first active electrode and the magazine and a second grounded electrode is positioned between the second active electrode and the magazine. The magazine is held at the same voltage as the first and second active electrodes and a plasma is generated which extends from the first active electrode to the second active electrode.
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申请公布号 |
US6267075(B1) |
申请公布日期 |
2001.07.31 |
申请号 |
US19990350322 |
申请日期 |
1999.07.09 |
申请人 |
YIELD ENGINEERING SYSTEMS, INC. |
发明人 |
MOFFAT WILLIAM A.;REYNOLDS ROYSTON JAMES |
分类号 |
B08B7/00;H01L21/00;(IPC1-7):C23C16/509 |
主分类号 |
B08B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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