发明名称 LOADING AND UNLOADING STATION FOR SEMICONDUCTOR PROCESSING APPARATUS
摘要 PROBLEM TO BE SOLVED: To ensure loading from a transporting container to a semiconductor processing apparatus under clean room conditions. SOLUTION: The loading and unloading station for the semiconductor processing apparatus having closable loading openings is capable of loading, unloading and reloading discs in a transporting container 6 through the loading opening after eliminating a closure 12, the container 6 has a container cover 15, the cover 15 extends in the direction approximately normal to a loading and unloading plane 10, the container 6 is fixed to the closure 12 by frictional coupling through the cover 15, the opening and the container 6 are simultaneously opened by lowering the cover 15 and the closure 12 together into the semiconductor processing apparatus, and the loading and unloading are performed by engaging them in the container 6 through a manipulator 22 inside the processing apparatus.
申请公布号 JP2001203252(A) 申请公布日期 2001.07.27
申请号 JP20000373483 申请日期 2000.12.07
申请人 BROOKS AUTOM INC 发明人 MAGES ANDREAS;SCHELER WERNER;BLASCHITZ HERBERT;SCHULZ ALFRED;SCHNEIDER HEINZ
分类号 B65D85/86;B65G1/00;B65G49/00;B65G49/07;H01L21/00;H01L21/673;H01L21/677;(IPC1-7):H01L21/68 主分类号 B65D85/86
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