发明名称 METHOD FOR DISPENSING FLUID
摘要 PROBLEM TO BE SOLVED: To provide a method and a system for dispensing a precise amount of fluid utilizing a rolling membrane pumping system. SOLUTION: The method includes a process where the amount of changed dispense is calculated based on a membrane flex which is at least partially predicted if a particular dispense is other than a first dispense. Further, following steps are included: the predicted membrane flex is at least partially based on a maximum pump chamber pressure during the first dispense, the amount of dispense change is calculated based at least on the membrane shape if the particular dispense is the first one, the piston of the pumping system is operated at least partially based on the calculated amount, the outlet valve of the pumping system is opened, the pump chamber pressure is monitored to detect an abrupt drop of the pump chamber pressure, the mechanical failure in the pumping system is reported with signal, and the maximum pressure of the pump chamber is measured during the movement of the piston.
申请公布号 JP2001203196(A) 申请公布日期 2001.07.27
申请号 JP20000318343 申请日期 2000.10.18
申请人 INTEGRATED DESIGNS LP 发明人 RAYMOND T SEIVAADO;JOHN C VINES
分类号 B67D7/14;F04B7/02;F04B13/00;F04B43/02;F04B43/04;H01L21/02;H01L21/31;(IPC1-7):H01L21/31 主分类号 B67D7/14
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