| 摘要 |
PURPOSE: A transfer system for sensing and checking a semiconductor wafer is provided to perform efficiently a test process of a semiconductor wafer by transferring selectively the semiconductor wafer according to a sensing operation of a scan sensor. CONSTITUTION: A scan sensor and a wafer sense portion transmit and receive a control signal and a data signal with an ISA card. The ISA card is composed of an interface portion(152), a register block portion(154), a data processing portion(100), an edge detection portion(160), a parallel signal processing portion(156), a selector mode direction selection portion(158), and a counter portion(164). The interface portion(152) interfaces a computer system. The register block portion(154) reads and writes data of the computer system and interfaces data/address/read/write signals to control the first and the second drive motors. The data processing portion(100) processes and stores various data to perform a data processing function and a memory clear function. The edge detection portion(160) senses and detects an upper and a lower portion of a storage housing(10) and stores the detected data to a memory(162). The parallel signal processing portion(156) converts a digital signal of an A/D converter(170) to a parallel signal and stores the converted signal to the memory(162). The selector mode direction selection portion(158) selects one of the first and the second drive motors or a rotary direction of the selected drive motor. The counter portion(164) performs the initialization of a counter according to an initial signal of the register block portion(154) and counts up or counts down a CW pulse according to the rotary direction of the drive motors.
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