摘要 |
electronic investigations. SUBSTANCE: proposed process consists in irradiation of anode-substrate by focuses electron beam, in formation of local X-ray radiation of certain wave length characteristic of element of material of anode and in excitation of secondary electrons by X-ray radiation. Anode- substrate comes in the form of composition made of several sections of individual pure elements spaced apart geometrically. These sections are subjected to action of focused electron beam in sequence. EFFECT: expanded functional capabilities of process. 1 dwg |