发明名称 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a method for producing semiconductor device, with which increase in the number of processes and the number of masks can be suppressed to a minimum and a high performance bipolar transistor and a high performance MOS transistor can be provided on the same wafer. SOLUTION: A base drawing electrode 105a of an NPN type bipolar transistor and a gate 105b of a PMOS type transistor are simultaneously formed while using the same material (polysilicon film 105) and an emitter drawing electrode 122a of the NPN type bipolar transistor, and a gate 122b of the NMOS type transistor can be simultaneously formed while using the same material (polysilicon film 122). Therefore, a surface channel type PMOS transistor can be provided while suppressing increase in the number of processes. As a result, the leakage current of the PMOS type transistor is decreased and a threshold Vth can be easily controlled.
申请公布号 JP2001203288(A) 申请公布日期 2001.07.27
申请号 JP20000011708 申请日期 2000.01.20
申请人 MITSUBISHI ELECTRIC CORP 发明人 YOSHIHISA YASUKI
分类号 H01L29/73;H01L21/331;H01L21/8222;H01L21/8248;H01L21/8249;H01L27/06;(IPC1-7):H01L21/824;H01L21/822 主分类号 H01L29/73
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