| 摘要 |
A liquid concentration sensing method and device for measuring the concentrations of at least two components contained in a liquid by applying at least two beams of light of different wavelength bands the center wavelength of which are 1.4 mu m to 2.05 mu m and measuring the intensity of each light beam transmitted through a liquid. The concentrations of components contained in a chemical used in a semiconductor manufacturing process or in a liquid crystal substrate manufacturing process are measured with high precision and high reliability in line and in real time by means of a simple structure. |
