发明名称 |
ELECTRON BEAM EVAPORATION OF TRANSPARENT INDIUM TIN OXIDE |
摘要 |
A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environmen t and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.
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申请公布号 |
CA2372300(A1) |
申请公布日期 |
2001.07.26 |
申请号 |
CA20002372300 |
申请日期 |
2000.12.22 |
申请人 |
GENVAC AEROSPACE CORP. |
发明人 |
MEARINI, GERALD T. |
分类号 |
C23C14/08;C23C14/22;C23C14/48;C23C14/54;H01B13/00;(IPC1-7):C23C14/08;C23C14/30 |
主分类号 |
C23C14/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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