发明名称 ELECTRON BEAM EVAPORATION OF TRANSPARENT INDIUM TIN OXIDE
摘要 A process for depositing a transparent coating of indium tin oxide on a substrate comprising providing said substrate in a partial vacuum environmen t and conducting electron beam evaporation of tin oxide doped indium oxide granules while operating an ion source providing oxygen adjacent said substrate until a coating of indium tin oxide is deposited on at least a portion of said substrate.
申请公布号 CA2372300(A1) 申请公布日期 2001.07.26
申请号 CA20002372300 申请日期 2000.12.22
申请人 GENVAC AEROSPACE CORP. 发明人 MEARINI, GERALD T.
分类号 C23C14/08;C23C14/22;C23C14/48;C23C14/54;H01B13/00;(IPC1-7):C23C14/08;C23C14/30 主分类号 C23C14/08
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