发明名称 |
Electrostatically attracting electrode and a method of manufacture thereof |
摘要 |
An electrostatic chuck for holding a substrate, including an electrode block which serves as an electrode for electrostatic attraction and a plurality of electrostatic attraction arranged on a surface of the electrode block. The electrostatic attraction members are disposed so as to attract the substrate electrostatically and to come in contact with the substrate. An insulating material covers the surface of the electrode block other than attraction surfaces of the electrostatic attraction members. Grooves made by the insulating material are provided between the individual electrostatic attraction members.
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申请公布号 |
US2001009497(A1) |
申请公布日期 |
2001.07.26 |
申请号 |
US20010795486 |
申请日期 |
2001.03.01 |
申请人 |
TAKAHASI KAZUE;ITOU YOUICHI;KANAI SABURO;KANNO SEIICHIRO |
发明人 |
TAKAHASI KAZUE;ITOU YOUICHI;KANAI SABURO;KANNO SEIICHIRO |
分类号 |
H01L21/683;(IPC1-7):H02N13/00 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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