| 摘要 |
<p>A wafer transfer control apparatus is disclosed which is capable of easily maximizing the throughput of a wafer processing apparatus such as a semiconductor manufacturing apparatus and satisfying the demand for immediacy of the motion of transfer machines. The wafer transfer control apparatus comprises an input unit (12) for inputting the time needed for each motion of the transfer machines (1a - 1c) and the time needed to process a wafer in each of the processing apparatuses (3a - 9d), and a schedule calculation unit (21) that calculates the time when each motion of the transfer machines (1a - 1c) is taken so as to advance most the time when the last one of the objective wafers is recovered from a wafer processing apparatus according to a predetermined conditional expression including the inputted time as a parameter. The wafer transfer control apparatus also comprises a motion instruction unit (24) that, when the time reaches a calculated motion execution time of one of the transfer machines (1a - 1c), instructs the transfer machine to take the motion.</p> |
