发明名称 Self-aligned lateral DMOS with spacer drift region
摘要 An LDMOS transistor formed in an N-type substrate. A polysilicon gate is formed atop the N-type substrate. A P-type well is formed in the N-type substrate extending from the source side to under the polysilicon gate. A N+source region is formed in the P-type well and adjacent to the polysilicon gate. A N+drain region is formed in the N-type substrate and in the drain side of the polysilicon gate. Finally, an N-type drift region is formed between the N+drain region and the polysilicon gate, wherein the N-type drift region does not extend to said polysilicon gate.
申请公布号 US2001009790(A1) 申请公布日期 2001.07.26
申请号 US20010796384 申请日期 2001.02.28
申请人 HSING MICHAEL R. 发明人 HSING MICHAEL R.
分类号 H01L29/08;H01L29/10;H01L29/423;H01L29/78;(IPC1-7):H01L21/336 主分类号 H01L29/08
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