| 摘要 |
PURPOSE: A contact structure having silicon finger contactors and total stack-up structure using same is provided, which includes a contact structure and an interface assembly using the contact structure for electrically contacting with a contact target to establish electrical communication therebetween, thereby achieving a high frequency bandwidth, high pin counts and high contact performance as well as high reliability. CONSTITUTION: A contact structure for establishing electrical communication with contact targets with improved contact performance including frequency bandwidth, contact pitch, reliability and cost. The contact structure is formed of a plurality of finger like contactors mounted on a contact substrate(20). Each of the contactors includes a silicon base having an inclined support portion, an insulation layer formed on the silicon base and projected from the inclined support, and a conductive layer(35) made of conductive material formed on the insulation layer so that a beam portion is created by the insulation layer and the conductive layer(35), wherein the beam portion exhibits a spring force in a transversal direction of the beam portion to establish a contact force when the tip of the beam portion pressed against a contact target. An adhesive is applied for bonding the contactors to the surface of the contact substrate(20). |
