发明名称 METHOD FOR PRODUCING SYNTHETIC QUARTZ GLASS MEMBER
摘要 PROBLEM TO BE SOLVED: To obtain a synthetic quartz glass member of fixed shape by a short process without damage by carelessness of handling, formed by a process for transparently vitrifying a porous silica sintered compact and carrying out a process for eliminating foams by one process. SOLUTION: In this method for producing the synthetic quartz glass member in which a silane compound is subjected to a flame hydrolysis by a multiple pipe burner, formed synthetic silica fine particles are adhered and deposited on a starting substrate which is rotated, the porous silica sintered compact is formed while being taken-off axially, then the sintered compact is heated, transparently vitrified and molded into a fixed shape, the method for producing the synthetic quartz glass member is characterized in that the porous silica sintered compact is placed on a mold material of fixed size having an open top part and heated at 1,750 to 1,800 deg.C so that the porous silica sintered compact is transparently vitrified, naturally penetrated into the mold material to give the synthetic quartz glass member of fixed shape corresponding to the mold material.
申请公布号 JP2001199733(A) 申请公布日期 2001.07.24
申请号 JP20000003194 申请日期 2000.01.12
申请人 SHIN ETSU CHEM CO LTD 发明人 TAKANO SHINICHI;OTSUKA HISATOSHI;SHIROTA KAZUO
分类号 C03B8/04;C03B19/00;C03B19/14;C03B20/00;(IPC1-7):C03B19/14 主分类号 C03B8/04
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