| 发明名称 |
Process and apparatus for making composite films |
| 摘要 |
The present invention is directed to a process for forming composite films. The films are formed on a substrate by directing a gas containing reactant species onto the substrate. The composite film is formed from an interaction between two reactant species. At least a portion of the substrate remains within the purview of the plasma discharge while the composite film is formed on the substrate.
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| 申请公布号 |
US6264749(B1) |
申请公布日期 |
2001.07.24 |
| 申请号 |
US19990333626 |
申请日期 |
1999.06.15 |
| 申请人 |
AGERE SYSTEMS GUARDIAN CORP. |
发明人 |
DESANTOLO ANTHONY MICHAEL;MANDICH MARY LOUISE |
| 分类号 |
C23C16/30;C23C16/34;C23C16/44;C23C16/455;C23C16/511;H01L21/285;H01L21/31;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/30 |
| 代理机构 |
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