| 摘要 |
A micromechanically produced flow-restriction device has a first passage opening formed in a first main surface of a substrate. A channel is formed in a second main surface of the substrate and one end thereof is in fluid communication with the first passage opening. A second passage opening is in fluid communication with a second end of the channel. The first passage opening, the channel and the second passage opening define a flow path. A membrane is formed in the substrate and is in fluid communication with the first passage opening. A membrane electrode is formed at least on the membrane. A cover is attached to the second main surface of the substrate in such a way that the cover defines together with the channel a flow resistance of the flow-restriction device, the cover being provided with a counterelectrode which is arranged in opposed, spaced relationship with the membrane electrode in such a way that the membrane electrode and the counterelectrode define a capacitive pressure sensor, the capacitive pressure sensor being arranged on a wall of the flow path.
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