发明名称 Electrostatic-erasing abrasion-proof coating and method for forming the same
摘要 An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
申请公布号 US6265070(B1) 申请公布日期 2001.07.24
申请号 US19980064779 申请日期 1998.04.23
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 ITOH KENJI
分类号 C03C17/34;C03C17/42;C04B41/50;C04B41/52;C04B41/85;C04B41/89;C23C16/26;C23C16/509;H01L31/0216;(IPC1-7):B32B17/00 主分类号 C03C17/34
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