发明名称 |
Electrostatic-erasing abrasion-proof coating and method for forming the same |
摘要 |
An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.
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申请公布号 |
US6265070(B1) |
申请公布日期 |
2001.07.24 |
申请号 |
US19980064779 |
申请日期 |
1998.04.23 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
ITOH KENJI |
分类号 |
C03C17/34;C03C17/42;C04B41/50;C04B41/52;C04B41/85;C04B41/89;C23C16/26;C23C16/509;H01L31/0216;(IPC1-7):B32B17/00 |
主分类号 |
C03C17/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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