IN-SITU CLEANING METHOD AND APPARATUS IN GAS COLLECTOR

摘要

PURPOSE: An in-situ cleaning method and an apparatus in a gas collector are provided to clean the inside of a canister with in-situ. CONSTITUTION: An observing window(100) is used to a canister(10) of a gas collector. The observing window consists of a removable glass material which is adhered to a flange(32) formed to the canister. The flange is circular and forms an access port toward the inside of the canister. The access port is connected to a lower plenum of the canister. The method includes two steps. The first step is to install a removable glass material which is adhered to the flange formed to the canister. The second step is to supply the access port connected to the inside of the canister by removing the glass material.