| 摘要 |
PURPOSE: A device of a field emission display(FED) and a manufacturing method thereof are provided to grow and synthesize a carbon nano tube of high efficiency and form a gate electrode on the tube without inserting a control grid electrode. CONSTITUTION: In the method of manufacturing a device of a field emission display(FED), a cathode electrode layer(2) is formed on a glass substrate(1). Here, the layer(2) is for applying a voltage for displaying. A catalytic metal layer(3) is formed after the metal is laminated by a sputtering and patterning method, to form a grain to grow the carbon nano tube. Here, Co, Fe or Ni can be used as the catalytic metal(3). The first SiO2 insulation layer(4) is formed over the catalytic metal layer(3). A gate electrode(5) is laminated and patterned on the SiO2 insulation layer(4). In turn, the second SiO2 insulation layer(6) is formed on the gate electrode(5). A pixel area(7) is etched. A carbon nano tube(8) is laminated on the upper part of the catalytic metal(3) of the pixel area(7) by laminating the carbon nano tube with a CVD device. Thus, the carbon nano tube(8) is not laminated on the second SiO2 insulation layer(6).
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