MICROFABRICATED ELASTOMERIC VALVE AND PUMP SYSTEMS
摘要
A method of fabricating an elastomeric structure, comprising : forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.
申请公布号
WO0101025(A3)
申请公布日期
2001.07.19
申请号
WO2000US17740
申请日期
2000.06.27
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY;UNGER, MARC, A.;CHOU, HOU-PU;THORSEN, TODD, A.;SCHERER, AXEL;QUAKE, STEPHEN, R.
发明人
UNGER, MARC, A.;CHOU, HOU-PU;THORSEN, TODD, A.;SCHERER, AXEL;QUAKE, STEPHEN, R.