发明名称 |
CALCIUM FLOURIDE CRYSTAL, OPTICAL ARTICLE AND EXPOSURE APPARATUS FOR PHOTO-LITHOGRAPHY USING THE SAME |
摘要 |
It is an object of the present invention to provide a calcium fluoride crystal in which the light transparency does not deteriorate with consecutive irradiation by high output short wavelength light over long time periods. A calcium fluoride crystal in accordance with the present invention has an internal transmittance of 70% or more for light of 135-nm wavelength or over. A calcium fluoride crystal contains any one of strontium, aluminum, silicon and magnesium, with the strontium content ranging from 1 ppm to 600 ppm, the aluminum content ranging from 1 ppm to 50 ppm, the silicon content ranging from 1 ppm to 50 ppm, or the magnesium content ranging from 1 ppm to 10 ppm. A calcium fluoride crystal has an internal transmittance of 70% or more for light of 135-nm wavelength or over and contains 1 ppm or less of La and 10 ppm or less of Y. An optical system for an excimer laser in accordance with the present invention comprises a lens comprising any calcium fluoride crystal set forth above. An exposure apparatus for photo-lithography in accordance with the present invention comprises an optical system comprising the calcium fluoride crystal and a stage for holding a substrate to be exposed.
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申请公布号 |
US2001008540(A1) |
申请公布日期 |
2001.07.19 |
申请号 |
US19970822938 |
申请日期 |
1997.03.21 |
申请人 |
OBA TOMORU;ICHIZAKI TOSHIO |
发明人 |
OBA TOMORU;ICHIZAKI TOSHIO |
分类号 |
C01F11/22;C30B11/00;G02B1/02;G03F7/20;H01S3/00;H01S3/034;(IPC1-7):B32B19/00;C30B9/00 |
主分类号 |
C01F11/22 |
代理机构 |
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代理人 |
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主权项 |
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